00577nam a2200217Ia 4500008004100000020001800041041001200059082001400071100001400085111000700099245009500106250000600201260001700207300001900224365001900243366001300262541003000275563001500305652001900320852002000339141108s9999 xx 000 0 und d a9780195693270 aEnglish a620.5 TAN aTANIGUCHI aNO aNANOTECHNOLOGY : INTEGRATED PROCESSING SYSTEMS FOR ULTRA PRECISION AND ULTRA FINE PRODUCTS a1 bOXFORDc2008 a406b25fPaper b595.00dRupees ePURCHASE aTBHd23-12-2013cSupplier aPaper Pack aNANOTECHNOLOGY aCENTRAL LIBRARY